Vibration type differential pressure sensor

Abstract

PURPOSE:To reduce a static pressure error by performing arithmetic operation by an arithmetic means with a signal from a measuring means so that the influence of molten metal pressure applied to a vibrator is removed. CONSTITUTION:A diaphragm 2 is formed by etching a substrate 1 anisotropically, a vibration beam 3 is arranged at its center part, and a vibration beam 4 is arranged at its fixed end part. The resonance frequency based upon the differential pressure between the vibration beams 3 and 4 is measured by the measuring means and the resonance frequency of the vibration beams 3 and 4 at the time of the application of the differential pressure is subtracted or added according to the signal of the measuring means to remove the influence of static pressure application.

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Patent Citations (2)

    Publication numberPublication dateAssigneeTitle
    JP-S57188138-UNovember 29, 1982
    JP-S60186725-ASeptember 24, 1985Yokogawa Hokushin Electric CorpPressure sensor

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Cited By (3)

    Publication numberPublication dateAssigneeTitle
    JP-2006170984-AJune 29, 2006General Electric Co , ゼネラル・エレクトリック・カンパニイGeneral Electric Company圧力を検知するためのシステム及び方法
    JP-H02269928-ANovember 05, 1990Yokogawa Electric CorpVacuum gauge
    US-7584063-B2September 01, 2009Yokagawa Electric CorporationMultivariable transmitter and computation processing method of the same