Method for performing cathodic sputtering and spray apparatus for cathodic sputtering

Patent Citations (2)

    Publication numberPublication dateAssigneeTitle
    JP-S63121661-AMay 25, 1988Philips & Du Pont OpticalCathode sputtering apparatus
    JP-S63145770-AJune 17, 1988Toshiba CorpSputtering device

NO-Patent Citations (0)

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